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MacroFlow is applicable to systems that exhibit any combination of steady, unsteady,
incompressible or compressible
thermo-fluid behavior. Therefore, MacroFlow can be used to analyze the thermo-fluid behavior of a virtually limitless variety of flow systems. For example, MacroFlow has been used to model
- gas and liquid delivery systems in semiconductor processing applications
- intake and exhaust manifolds of internal combustion engines
- automotive oil-lubrication systems
- ventilation and cooling systems
- filtration systems
- mufflers
- electronics cooling scenarios
- pipe networks
- heat exchangers
- coolers and dryers
- gas supply systems
- cryogenic systems
- and many more...
Design of Gas and Liquid Delivery Systems in Semiconductor Processing
MacroFlow is particularly well-suited for the analysis of ultra-high purity gas delivery systems and liquid
delivery systems in Semiconductor Processing applications. Thus, it enables analysis of gas sticks that include valves, mass flow controllers (MFCs), and ultra-high purity gas filters. Simulation
of the unsteady behavior of gas flow systems can also be performed in an efficient manner to study time scales for purging processes that involve charging and discharging phenomena. In order to
facilitate the ease of setting up models for gas delivery systems involving compressible flow, MacroFlow contains the following two important features:
- A comprehensive library of properties of various inert and reactive gases used in semiconductor processing
- A library of the characteristics of gas filters offered by Entegris (www.entegris.com) and Mott Corporation (www.mottcorp.com)
MacroFlow also enables rapid and accurate analysis of liquid delivery systems involving flow of various
liquids through systems that include tubes, pumps, valves, elbows and mixing chambers.
MacroFlow is being actively used at leading semiconductor tool makers for designing gas delivery systems (e.g. gas
sticks, supply lines) and liquid delivery systems (e.g. supply and distribution manifolds for corrosive liquids).
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Examples of Practical Applications of MacroFlow
MacroFlow was used to optimize an automobile air-conditioning compressor
system, by investigating the effect of valve timing, chamber volume, orifice geometry, and operating fluid on volumetric performance.
For a proposed avionics cooling system, MacroFlow was used to select cooling
fans and blowers, and to optimize their placement. This MacroFlow model was then used to assess the impact of fan/blower failure on the operating temperatures of essential components.
Exhaust system of an automobile needs to be designed to reduce the noise
while minimizing the engine back pressure. MacroFlow was successfully used to evaluate the relative performance of a single and dual exhaust system for a passenger car.
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